Silicon Carbide Microsystems for Harsh Environments

Silicon Carbide Microsystems for Harsh Environments
By:Muthu Wijesundara,Robert Azevedo
Published on 2011-05-17 by Springer Science & Business Media

Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

This Book was ranked at 28 by Google Books for keyword High Voltage.

Book ID of Silicon Carbide Microsystems for Harsh Environments's Books is fSp011NddscC, Book which was written byMuthu Wijesundara,Robert Azevedo

Book which was published by Springer Science & Business Media since 2011-05-17 have ISBNs, ISBN 13 Code is 9781441971210 and ISBN 10 Code is 1441971211

Book which have "232 Pages" is Printed at BOOK under CategoryTechnology and Engineering

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